Fabrication of silicon microprobes for optical near-field applications
| Author(s) : | Esashi Masayoshi , Minh Phan Ngoc. , Takahito Ono. , |
| Publisher : | Boca Raton, Fla. :CRC Press, |
| Publication Date : | c2002. |
| ISSN : | 0849311543 (alk. paper) |
| Location : | Main, |
| Call Number : | TJ1191.5.M5526 2002 |