Nano- and microelectromechanical systems : fundamentals of nano- and microengineering
| Author(s) : | Lyshevski Sergey Edward. , |
| Publisher : | Boca Raton, Fla. :CRC Press |
| Publication Date : | 2001 |
| ISSN : | 0849309166 |
| Location : | Main, |
| Call Number : | TK7875.L96 2001 |